STRUCTURE AND PROPERTIES OF AMORPHOUS DIAMOND-LIKE CARBON-FILMS PRODUCED BY ION-BEAM-ASSISTED PLASMA DEPOSITION

被引：16

作者：

CHEN, J

CONRAD, JR

DODD, RA

机构：

[1] Plasma Source Ion Implantation Program, University of Wisconsin-Madison, Wisconsin

来源：

JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE | 1993年 / 2卷 / 06期

关键词：

DIAMOND-LIKE CARBON FILM; PLASMA DEPOSITION; TRIBOLOGICAL TEST;

D O I：

10.1007/BF02645683

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructure and tribological properties of carbon film produced by ion beam assisted plasma deposition in a plasma source ion implantation (PSII) chamber with energies varied from 0 to 30 keV are examined. The process is illustrated schematically, and Raman spectra as well as TEM images and corresponding diffraction patterns of carbon films are shown.

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页码：839 / 842

页数：4

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