THE CHEMICAL VAPOR-DEPOSITION OF ALUMINA FROM ALCL3-H2-CO2 ON A STOICHIOMETRIC TIC SUBSTRATE - A THERMODYNAMIC APPROACH

被引:23
作者
LHERMITTESEBIRE, I [1 ]
COLMET, R [1 ]
NASLAIN, R [1 ]
BERNARD, C [1 ]
机构
[1] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,INST NATL POLYTECH GRENOBLE,F-38402 ST MARTIN DHERES,FRANCE
来源
JOURNAL OF THE LESS-COMMON METALS | 1986年 / 118卷 / 01期
关键词
D O I
10.1016/0022-5088(86)90612-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:83 / 102
页数:20
相关论文
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