THE CHEMICAL VAPOR-DEPOSITION OF ALUMINA FROM ALCL3-H2-CO2 ON A STOICHIOMETRIC TIC SUBSTRATE - A THERMODYNAMIC APPROACH

被引：23

作者：

LHERMITTESEBIRE, I ^{[1
]}

COLMET, R ^{[1
]}

NASLAIN, R ^{[1
]}

BERNARD, C ^{[1
]}

机构：

[1] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,INST NATL POLYTECH GRENOBLE,F-38402 ST MARTIN DHERES,FRANCE

来源：

JOURNAL OF THE LESS-COMMON METALS | 1986年 / 118卷 / 01期

关键词：

D O I：

10.1016/0022-5088(86)90612-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：83 / 102

页数：20

相关论文

共 26 条

[11] EFFECTS OF THE EXPERIMENTAL PARAMETERS ON THE PREFERRED ORIENTATION OF CHEMICALLY VAPOR-DEPOSITED TIC ON CEMENTED CARBIDES
LEE, CW
NAM, SW
CHUN, JS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 42 - 46
[12] THE ADHESION BETWEEN PHYSICALLY VAPOR-DEPOSITED OR CHEMICALLY VAPOR-DEPOSITED ALUMINA AND TIC-COATED CEMENTED CARBIDES AS CHARACTERIZED BY AUGER-ELECTRON SPECTROSCOPY AND SCRATCH TESTING
LHERMITTESEBIRE, I
COLMET, R
NASLAIN, R
DESMAISON, J
GLADEL, G
[J]. THIN SOLID FILMS, 1986, 138 (02) : 221 - 233
[13] LHERMITTESEBIRE I, UNPUB
[14] NUCLEATION OF AL-20-3 LAYERS ON CEMENTED CARBIDE TOOLS
LINDSTROM, JN
JOHANNESSON, RT
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (04) : 555 - 559
[15] MINET J, 1984, COMMUNICATION
[16] A COMPARATIVE-EVALUATION OF HFN, AL2O3, TIC AND TIN COATINGS ON CEMENTED CARBIDE TOOLS
OAKES, JJ
[J]. THIN SOLID FILMS, 1983, 107 (02) : 159 - 165
[17] CUTTING PERFORMANCE AND CHEMICAL CHARACTERIZATION OF TIC-COATED CARBIDE CUTTING TOOLS
ODREY, NG
TONGSON, L
BIGGERS, JV
KNOX, BE
HAM, I
[J]. THIN SOLID FILMS, 1981, 79 (01) : 83 - 89
[18] CRYSTALLOGRAPHIC ORIENTATION AND SURFACE-MORPHOLOGY OF CHEMICAL VAPOR-DEPOSITED AL2O3
PARK, CS
KIM, JG
CHUN, JS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (07) : 1607 - 1611
[19] PARK CS, 1983, 4TH P EUR C CVD EIND, P401
[20] PODOB M, 1982, MET PROG MAY, P50