EFFECTS OF THE EXPERIMENTAL PARAMETERS ON THE PREFERRED ORIENTATION OF CHEMICALLY VAPOR-DEPOSITED TIC ON CEMENTED CARBIDES

被引：17

作者：

LEE, CW

NAM, SW

CHUN, JS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 01期

关键词：

D O I：

10.1116/1.571733

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：42 / 46

页数：5

共 20 条

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