EFFECTS OF THE EXPERIMENTAL PARAMETERS ON THE PREFERRED ORIENTATION OF CHEMICALLY VAPOR-DEPOSITED TIC ON CEMENTED CARBIDES

被引:17
作者
LEE, CW
NAM, SW
CHUN, JS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 01期
关键词
D O I
10.1116/1.571733
中图分类号
O59 [应用物理学];
学科分类号
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页码:42 / 46
页数:5
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