Characterization of (Pb1-xLax)TiO3 thin films grown by radio - Frequency magnetron sputtering and their electrical properties

Microstructure, composition, and electrical properties were investigated for polycrystalline (Pb,La)TiO3 (PLT) thin films deposited from the 10 and 20 mol% excess PbO targets. The compositional analysis by Rutherford backscattering pectroscopy shows that PLT films from 20 mol% excess PbO have almost stoichiometric composition and a dense structure. The dielectric constant and a dissipation factor of PLT films from 20 mol% excess PbO were 640 and 0.02 at 100 kHz, respectively. The conduction behavior of PLT films from 10 mol% excess PbO suggested a bulk-limited Poole-Frenkel emission in the high field region, while from 20 mol% excess PbO induced a electrode-limited Schottky emission.