VARIATION OF ION CURRENT FLOWING INTO DOUBLE PROBES WITH COATING OF ORGANIC THIN-FILM IN RF DISCHARGE PLASMA

被引：8

作者：

YAMAGUCHI, S

SAWA, G

IEDA, M

机构：

[1] MIE UNIV,DEPT ELECTR,TSU,MIE 514,JAPAN

[2] NAGOYA UNIV,DEPT ELECT ENGN,NAGOYA,AICHI 464,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 05期

关键词：

D O I：

10.1143/JJAP.26.728

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：728 / 733

页数：6

共 10 条

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[3]

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[5] SURFACE CONTAMINATION OF ACTIVE ELECTRODES IN PLASMAS - DISTORTION OF CONVENTIONAL LANGMUIR PROBE MEASUREMENTS [J].

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[6] MEASUREMENTS WITH DOUBLE PROBES IN ORGANIC VAPOR FOR UNDERSTANDING GLOW-DISCHARGE POLYMERIZATION PROCESSES [J].

YAMAGUCHI, S ;

SAWA, G ;

IEDA, M .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (06) :2363-2369

[7] A CONSIDERATION ON GROWTH-PROCESSES OF PLASMA-POLYMERIZED STYRENE FILM [J].

YAMAGUCHI, S ;

SAWA, G ;

IEDA, M .

KOBUNSHI RONBUNSHU, 1981, 38 (10) :623-628

[8]

YAMAGUCHI S, 1979, ACS S SERIES, V108, P115

[9]

YAMAGUCHI S, 1981, JPN J APPL PHYS, V21, pL610

[10]

YAMAGUTI S, 1981, T I ELECTR ENG JPN A, V101, P80

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