SPATIALLY RESOLVED MEASUREMENT OF SUBSTITUTIONAL DOPANT CONCENTRATIONS IN SEMICONDUCTORS

被引：20

作者：

PENNYCOOK, SJ

NARAYAN, J

HOLLAND, OW

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.94833

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：547 / 549

页数：3

共 15 条

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JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :6875-6878

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