CRYSTALLIZATION OF AMORPHOUS-SILICON DURING THIN-FILM GOLD REACTION

被引：215

作者：

HULTMAN, L

ROBERTSSON, A

HENTZELL, HTG

ENGSTROM, I

PSARAS, PA

机构：

[1] UNIV UPPSALA,INST CHEM,S-75121 UPPSALA,SWEDEN

[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1063/1.339244

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3647 / 3655

页数：9

共 44 条

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