ORIGINS OF STRESS-INDUCED PERPENDICULAR MAGNETIC-ANISOTROPY OF SPUTTERED IRON-OXIDE THIN-FILMS

被引:9
作者
LIN, JK [1 ]
SIVERTSEN, JM [1 ]
JUDY, JH [1 ]
机构
[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455
关键词
MAGNETIC MATERIALS - Stresses;
D O I
10.1109/TMAG.1986.1064581
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
CoCr-doped gamma - Fe//2 O//3 thin films prepared by RF sputtering and annealing processes exhibit stress-induced perpendicular magnetic anisotropy. The stress is found to be caused by both the ion bombardment on the film surface during sputter-deposition and the lattice misfit between the film and the substrate. Thermal effects play a less important role in causing stress in the films examined in this study.
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页码:594 / 596
页数:3
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