ORIGINS OF STRESS-INDUCED PERPENDICULAR MAGNETIC-ANISOTROPY OF SPUTTERED IRON-OXIDE THIN-FILMS

被引：9

作者：

LIN, JK ^{[1
]}

SIVERTSEN, JM ^{[1
]}

JUDY, JH ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1986年 / 22卷 / 05期

关键词：

MAGNETIC MATERIALS - Stresses;

D O I：

10.1109/TMAG.1986.1064581

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

CoCr-doped gamma - Fe//2 O//3 thin films prepared by RF sputtering and annealing processes exhibit stress-induced perpendicular magnetic anisotropy. The stress is found to be caused by both the ion bombardment on the film surface during sputter-deposition and the lattice misfit between the film and the substrate. Thermal effects play a less important role in causing stress in the films examined in this study.

引用

页码：594 / 596

页数：3

共 5 条

[1] PREPARATION OF IRON-OXIDE FILM WITH LARGE PERPENDICULAR MAGNETIC-ANISOTROPY
HOSHI, Y
MATSUOKA, M
NAOE, M
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) : 1459 - 1461
[2] INTERNAL STRESS OF EVAPORATED THIN GOLD FILMS
KINBARA, A
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1965, 4 (04) : 243 - +
[3] PROPERTIES OF RF SPUTTERED IRON-OXIDE THIN-FILMS WITH COCR AND NB AS DOPANTS
LIN, JK
SIVERTSEN, JM
JUDY, JH
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) : 1462 - 1464
[4] MECHANICAL STRESSES IN DC REACTIVELY SPUTTERED FE2O3 THIN-FILMS
ORLINOV, V
SAROV, G
[J]. THIN SOLID FILMS, 1980, 68 (02) : 333 - 343
[5] MODIFICATION OF THE LUNAR SURFACE BY THE SOLAR-WIND BOMBARDMENT
WEHNER, GK
KENKNIGHT, CE
ROSENBERG, D
[J]. PLANETARY AND SPACE SCIENCE, 1963, 11 (11) : 1257 - 1261

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