DIRECT IMAGING OF THE TIP SHAPE BY AFM

被引：51

作者：

ATAMNY, F ^{[1
]}

BAIKER, A ^{[1
]}

机构：

[1] ETH ZENTRUM,DEPT CHEM ENGN & IND CHEM,CH-8092 ZURICH,SWITZERLAND

来源：

SURFACE SCIENCE | 1995年 / 323卷 / 03期

关键词：

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; COPPER; SCANNING ELECTRON MICROSCOPY (SEM); SILICON NITRIDE; SURFACE STRUCTURE; MORPHOLOGY; ROUGHNESS AND TOPOGRAPHY;

D O I：

10.1016/0039-6028(94)00752-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Direct imaging of the tip shape by AFM has been achieved using sharp pin-like structures present on copper films deposited on quartz by metal organic chemical vapor deposition (MOCVD).

引用

页码：L314 / L318

页数：5

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