RADIO-FREQUENCY MAGNETRON SPUTTERING OF MULTICOMPONENT FERROELECTRIC OXIDES

被引：6

作者：

KRUPANIDHI, SB

SAYER, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572588

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：303 / 306

页数：4

共 14 条

[1] ION-BEAM DEPOSITION OF THIN-FILMS OF FERROELECTRIC LEAD ZIRCONATE TITANATE (PZT) [J].

CASTELLANO, RN ;

FEINSTEIN, LG .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) :4406-4411

[2]

DIH JJ, 1968, J AM CERAM SOC, V61, P448

[3]

FRANCOMBE MH, 1975, EPITAXIAL GROWTH A, P109

[4]

GILBERT LR, 1969, J VAC SCI TECHNOL, V17, P389

[5]

JONES RE, 1969, J VAC SCI TECHNOL, V5, P84

[6] RF PLANAR MAGNETRON SPUTTERING AND CHARACTERIZATION OF FERROELECTRIC PB(ZR,TI)O3 FILMS [J].

KRUPANIDHI, SB ;

MAFFEI, N ;

SAYER, M ;

ELASSAL, K .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6601-6609

[7] DISCHARGE CHARACTERISTICS FOR MAGNETRON SPUTTERING OF AL IN AR AND AR-O-2 MIXTURES [J].

MANIV, S ;

WESTWOOD, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03) :743-751

[8] ELECTRICAL-PROPERTIES OF LEAD-ZIRCONATE-LEAD-TITANATE FERROELECTRIC THIN-FILMS AND THEIR COMPOSITION ANALYSIS BY AUGER-ELECTRON SPECTROSCOPY [J].

OKADA, A .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (08) :4495-4499

[9]

PANNEBAKER WB, 1969, IBM J RES DEV, V13, P686

[10] ROLE OF PLASMATRON-MAGNETRON SYSTEMS IN PHYSICAL VAPOR-DEPOSITION TECHNIQUES [J].

SCHILLER, S ;

HEISIG, U ;

GOEDICKE, K .

THIN SOLID FILMS, 1978, 54 (01) :33-47

← 1 2 →