ION-BEAM MODIFICATION OF AMORPHOUS WO3 FILM AND ITS PROPERTIES AS A HIGH-CONTRAST INORGANIC-ION RESIST

被引：19

作者：

KOSHIDA, N

TOMITA, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 01期

关键词：

D O I：

10.1143/JJAP.24.92

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：92 / 94

页数：3

共 19 条

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