LOW-TEMPERATURE CONDUCTIVITY IN PLASMA-POLYMERIZED SILAZANE FILMS

被引：4

作者：

TYCZKOWSKI, J

KAZIMIERSKI, P

机构：

来源：

关键词：

D O I：

10.1016/0042-207X(89)90085-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：11 / 12

页数：2

共 10 条

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[4] CORRELATION OF CHEMICAL AND ELECTRICAL-PROPERTIES OF PLASMA-DEPOSITED TETRAMETHYLSILANE FILMS
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[5] CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAMETHYLSILANE FILMS
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[6] PHASE-TRANSITION EFFECTS IN PLASMA-POLYMERIZED ORGANOSILICON FILMS
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[J]. JOURNAL OF MACROMOLECULAR SCIENCE-PHYSICS, 1987, B26 (02): : 217 - 226
[7] TYCZKOWSKI J, 1982, POLYM BULL, V8, P117, DOI 10.1007/BF00263017
[8] ON DIFFERENTIATION OF ELECTRICAL-CONDUCTION PROCESSES IN POLYMERS
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[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 72 (02): : 751 - 762
[9] PHOTOINJECTION INTO PLASMA-POLYMERIZED THIN ORGANO-SILICON FILMS .2. THE STRUCTURE OF ENERGY-LEVELS
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[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (10) : 2053 - 2064
[10] TYCZKOWSKI J, 1984, J APPL POLYM SCI APP, V38, P149