HYDROGEN REBONDING AND DEFECT FORMATION IN A-SI-H

被引:30
作者
LI, QM [1 ]
BISWAS, R [1 ]
机构
[1] IOWA STATE UNIV SCI & TECHNOL, MICROELECTR RES CTR, AMES, IA 50011 USA
关键词
D O I
10.1103/PhysRevB.52.10705
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effect of short-range hydrogen rebonding in creating metastable defects in a-Si:H is studied with a tight-binding molecular-dynamics model that takes into account both electronic and structural energies. The formation energy of defects created by transferring hydrogen from Si-H sites to weak Si-Si bond sites is found to scale linearly with the Si-Si bond length. This H rebonding mechanism can account for several features of thermally generated and light-induced defects. This suggests that the bond-length disorder may be the dominant factor in controlling the defect density in a-Si:H.
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页码:10705 / 10708
页数:4
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