OXIDATION AT THE POLYIMIDE CU INTERFACE

被引：27

作者：

CHAMBERS, SA

CHAKRAVORTY, KK

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575468

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3008 / 3011

页数：4

共 14 条

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[8] HIGH-RESOLUTION X-RAY PHOTOEMISSION SPECTRA OF PBS, PBSE, AND PBTE VALENCE BANDS
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[9] X-RAY PHOTOEMISSION INVESTIGATION OF ELECTRON INJECTION AND TRAPPING AT THE GOLD POLYIMIDE INTERFACE
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1002 - 1004
[10] FACTORS CONTRIBUTING TO CORROSION OF ALUMINUM METAL ON SEMICONDUCTOR-DEVICES PACKAGED IN PLASTICS
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