NONLINEAR DIFFUSION EQUATION FOR CRYSTAL-GROWTH ON STEPPED SURFACES

被引：11

作者：

MYERSBEAGHTON, AK ^{[1
]}

VVEDENSKY, DD ^{[1
]}

机构：

[1] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,INTERDISCIPLINARY RES CTR SEMICOND MAT,LONDON SW7 2BZ,ENGLAND

来源：

JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL | 1990年 / 23卷 / 18期

关键词：

D O I：

10.1088/0305-4470/23/18/010

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An equation that includes both adatom diffusion and diatomic island formation is derived for describing growth on stepped surfaces. The equation is integrated numerically to obtain adatom and island concentration profiles along the terraces. Comparison of this solution with experimental measurements on vicinal GaAs(001) for a variety of Ga and As2 fluxes and with Monte Carlo simulations shows that inclusion of island formation in the growth equation is crucial in determining the temperature beyond which growth becomes dominated by step propagation.

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页码：L995 / L1001

页数：7

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