EXPERIMENTAL APPARATUS FOR DETERMINING CHARGE-EXCHANGE BETWEEN HYDROGEN AND HYDROCARBON GROUPS IN THE HOT-FILAMENT DEPOSITION OF DIAMOND

被引：9

作者：

CHERRY, RI

WHITMORE, T

机构：

[1] Department of Mathematics and Physics, Manchester Metropolitan University, Manchester M1 5GD, Chester Street

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 20期

关键词：

D O I：

10.1063/1.115447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The charge balance in the hot filament method of depositing diamond is explored using a novel experimental arrangement. A correlation between ion activity and the growth of diamond is drawn. (C) 1995 American Institute of Physics.

引用

页码：3040 / 3042

页数：3

共 9 条

[1] TOWARDS A GENERAL CONCEPT OF DIAMOND CHEMICAL VAPOR-DEPOSITION [J].

BACHMANN, PK ;

LEERS, D ;

LYDTIN, H .

[2] CLARIFICATION OF THE EFFECT OF BIAS IN THE HOT FILAMENT PROCESS [J].

BANHOLZER, W ;

KEHL, R .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :51-58

[3]

Celii FG, 1990, SCI TECHNOLOGY NEW D, P17

[4] THE MEASUREMENT OF ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN METHANE-HYDROGEN PLASMAS [J].

CHERRY, RI ;

WHITMORE, TD .

[5] GAS-PHASE KINETICS DURING DIAMOND GROWTH - CH4 AS-GROWTH SPECIES [J].

HARRIS, SJ .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (08) :3044-3048

[6] ELECTRON-MICROSCOPIC CHARACTERIZATION OF DIAMOND FILMS GROWN ON SI BY BIAS-CONTROLLED CHEMICAL VAPOR-DEPOSITION [J].

MA, GHM ;

LEE, YH ;

GLASS, JT .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2367-2377

[7] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS [J].

MATSUMOTO, S ;

SATO, Y ;

TSUTSUMI, M ;

SETAKA, N .

JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) :3106-3112

[8]

SWIFT JD, 1971, ELECTRIC PROBES PLAS

[9] DIAMOND GROWTH WITH LOCALLY SUPPLIED METHANE AND ACETYLENE [J].

YARBROUGH, WA ;

TANKALA, K ;

DEBROY, T .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (02) :379-383

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