OXYGEN COVERAGE DEPENDENT EMISSION OF SPUTTERED NEUTRALS AND SECONDARY IONS

被引：15

作者：

GNASER, H ^{[1
]}

SAIDOH, M ^{[1
]}

VONSEGGERN, J ^{[1
]}

HOFER, WO ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, INST GRENZFLACHENFORSCH & VAKUUMPHYS, D-5170 JULICH 1, FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90276-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：169 / 172

页数：4

共 26 条

[1]

Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[2] VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE [J].

DULLNI, E .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :610-613

[3] ANALYSIS OF SOLIDS BY SECONDARY ION AND SPUTTERED NEUTRAL MASS-SPECTROMETRY [J].

GNASER, H ;

FLEISCHHAUER, J ;

HOFER, WO .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 37 (04) :211-220

[4] NEGATIVE SECONDARY ION EMISSION FROM OXIDIZED SURFACES [J].

GNASER, H .

SURFACE SCIENCE, 1984, 138 (2-3) :561-569

[5]

GNASER H, 1983, NUCL INSTRUM METHODS, V218, P312, DOI 10.1016/0167-5087(83)90997-3

[6] THE EFFECT OF OXYGEN ON THE SPUTTERING OF METASTABLE ATOMS AND IONS FROM BA METAL [J].

GRISCHKOWSKY, D ;

YU, ML ;

BALANT, AC .

SURFACE SCIENCE, 1983, 127 (02) :315-330

[7] SPUTTERING OF SURFACES BY POSITIVE ION BEAMS OF LOW ENERGY [J].

HONIG, RE .

JOURNAL OF APPLIED PHYSICS, 1958, 29 (03) :549-555

[8] GROUND-STATE AND EXCITED-STATE SPUTTERING DOPPLER-SHIFT LASER-FLUORESCENCE STUDIES OF CR AND CA TARGETS [J].

HUSINSKY, W ;

BETZ, G ;

GIRGIS, I .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :698-701

[9] VELOCITY DISTRIBUTIONS AND SPUTTERING YIELDS OF CHROMIUM ATOMS UNDER ARGON, OXYGEN AND CARBON ION-BOMBARDMENT [J].

HUSINSKY, W ;

BETZ, G ;

GIRGIS, I ;

VIEHBOCK, F ;

BAY, HL .

JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :577-582

[10] ION AND NEUTRAL YIELDS FROM ION BOMBARDED METAL-SURFACES DURING CHEMISORPTION USING LOW-DOSE SIMS AND MULTIPHOTON RESONANCE IONIZATION [J].

KIMOCK, FM ;

BAXTER, JP ;

WINOGRAD, N .

SURFACE SCIENCE, 1983, 124 (2-3) :L41-L48

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