POSITIVE AND NEGATIVE-IONS IN SILANE AND DISILANE MULTIPOLE DISCHARGES

[41] SCHMITT J, UNPUB

[42] STATIC THEORY OF A DISCHARGE COLUMN AT INTERMEDIATE PRESSURES [J]. PHYSICS OF FLUIDS, 1966, 9 (12) : 2486 - &

[43] MUTUAL NEUTRALIZATION OF SIMPLE AND CLUSTERED POSITIVE AND NEGATIVE-IONS [J]. JOURNAL OF CHEMICAL PHYSICS, 1978, 68 (03) : 1224 - 1229

[44] LARGE DOUBLE PLASMA DEVICE FOR PLASMA BEAM AND WAVE STUDIES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (11) : 1675 - +

[45] A STUDY OF THE SILANE GLOW-DISCHARGE DEPOSITION BY ISOTOPIC LABELING [J]. THIN SOLID FILMS, 1981, 77 (04) : 287 - 300

[46] MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS [J]. THIN SOLID FILMS, 1980, 67 (02) : 309 - 320

[47] TURBAN G, 1981, THESIS U NANTES

[48] BOND-DISSOCIATION ENERGY VALUES IN SILICON-CONTAINING COMPOUNDS AND SOME OF THEIR IMPLICATIONS [J]. ACCOUNTS OF CHEMICAL RESEARCH, 1981, 14 (08) : 246 - 252

[49] WANDERWIELEN AJ, 1975, J AM CHEM SOC, V97, P993

[50] WEAKLIEM HA, 1980, 13TH AIAA FLUID PLAS

[41] SCHMITT J, UNPUB

[42] STATIC THEORY OF A DISCHARGE COLUMN AT INTERMEDIATE PRESSURES [J]. PHYSICS OF FLUIDS, 1966, 9 (12) : 2486 - &

[43] MUTUAL NEUTRALIZATION OF SIMPLE AND CLUSTERED POSITIVE AND NEGATIVE-IONS [J]. JOURNAL OF CHEMICAL PHYSICS, 1978, 68 (03) : 1224 - 1229

[44] LARGE DOUBLE PLASMA DEVICE FOR PLASMA BEAM AND WAVE STUDIES [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (11) : 1675 - +

[45] A STUDY OF THE SILANE GLOW-DISCHARGE DEPOSITION BY ISOTOPIC LABELING [J]. THIN SOLID FILMS, 1981, 77 (04) : 287 - 300

[46] MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS [J]. THIN SOLID FILMS, 1980, 67 (02) : 309 - 320

[47] TURBAN G, 1981, THESIS U NANTES

[48] BOND-DISSOCIATION ENERGY VALUES IN SILICON-CONTAINING COMPOUNDS AND SOME OF THEIR IMPLICATIONS [J]. ACCOUNTS OF CHEMICAL RESEARCH, 1981, 14 (08) : 246 - 252

[49] WANDERWIELEN AJ, 1975, J AM CHEM SOC, V97, P993

[50] WEAKLIEM HA, 1980, 13TH AIAA FLUID PLAS