RADIO-FREQUENCY MAGNETRON SPUTTERING OF RADIO-FREQUENCY BIASED QUARTZ ON A SCANNING PALLET

被引：4

作者：

MUMTAZ, A

DRAPKIN, I

MATHEW, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572731

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：237 / 240

页数：4

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