SIMULATION OF GAAS CLUSTER FORMATION ON GAAS(001BAR), ALAS(001BAR), SI(001), AND AS1/SI(001)SURFACES

被引：29

作者：

CHOI, DK

KOCH, SM

TAKAI, T

HALICIOGLU, T

TILLER, WA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.584267

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1140 / 1144

页数：5

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