SYNTHESIS OF B-DOPED DIAMOND FILM

被引：36

作者：

OKANO, K

AKIBA, Y

KUROSU, T

IIDA, M

NAKAMURA, T

机构：

[1] Department of Electronics, School of Engineering, Tokai University, Hiratsuka, Kanagawa, 259-12

来源：

JOURNAL OF CRYSTAL GROWTH | 1990年 / 99卷 / 1-4期

关键词：

D O I：

10.1016/S0022-0248(08)80106-6

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Boron-doped diamond films have been synthesized by the thermal filament CVD method. As the doping source, boron trioxide powder was used instead of diborane. The films obtained were identified as diamond by several methods including Raman spectroscopy. The resistivity of the films was inversely proportional to the doping concentration over four order. p-Type electrical conduction was also confirmed by measuring the Seebeck effect. © 1990, Elsevier Science Publishers B.V.. All rights reserved.

引用

页码：1192 / 1195

页数：4

共 6 条

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