TRILEVEL LIFT-OFF PROCESS FOR REFRACTORY-METALS

被引：16

作者：

GRABBE, P

HU, EL

HOWARD, RE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 01期

关键词：

D O I：

10.1116/1.571731

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：33 / 35

页数：3

共 14 条

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