MICROPOROSITY AND ADHESION OF ION BOMBARDED THIN SILICON SURFACE-FILMS

[1] ION-BEAM BONDING OF THIN-FILMS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 881 - 885

[2] MEASUREMENT OF ADHESION OF THIN FILMS [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1277): : 163 - 176

[3] ADHESION OF EVAPORATED TITANIUM FILMS TO ION-BOMBARDED POLYETHYLENE [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) : 1161 - 1168

[4] PROPERTY MODIFICATION AND SYNTHESIS BY LOW-ENERGY PARTICLE BOMBARDMENT CONCURRENT WITH FILM GROWTH [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 963 - 974

[5] FERBER H, 1985, P C RAD EFFECTS INSU, V3, P573

[6] MEASUREMENT OF ADHESION OF THIN EVAPORATED FILMS ON GLASS SUBSTRATES BY MEANS OF DIRECT PULL METHOD [J]. THIN SOLID FILMS, 1973, 15 (01) : 71 - 77

[7] Maissel L.I., 1970, HDB THIN FILM TECHNO

[8] SOFIELD CJ, 1985, P C RAD EFFECTS INSU, V3, P201

[9] ENHANCEMENT OF ADHESION BY MEGAELECTRONVOLT ION-BOMBARDMENT [J]. MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (02): : 443 - 447

[10] EQUIPMENT FOR ION-BEAM ASSISTED DEPOSITION [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) : 570 - 573

[1] ION-BEAM BONDING OF THIN-FILMS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 881 - 885

[2] MEASUREMENT OF ADHESION OF THIN FILMS [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1277): : 163 - 176

[3] ADHESION OF EVAPORATED TITANIUM FILMS TO ION-BOMBARDED POLYETHYLENE [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) : 1161 - 1168

[4] PROPERTY MODIFICATION AND SYNTHESIS BY LOW-ENERGY PARTICLE BOMBARDMENT CONCURRENT WITH FILM GROWTH [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 963 - 974

[5] FERBER H, 1985, P C RAD EFFECTS INSU, V3, P573

[6] MEASUREMENT OF ADHESION OF THIN EVAPORATED FILMS ON GLASS SUBSTRATES BY MEANS OF DIRECT PULL METHOD [J]. THIN SOLID FILMS, 1973, 15 (01) : 71 - 77

[7] Maissel L.I., 1970, HDB THIN FILM TECHNO

[8] SOFIELD CJ, 1985, P C RAD EFFECTS INSU, V3, P201

[9] ENHANCEMENT OF ADHESION BY MEGAELECTRONVOLT ION-BOMBARDMENT [J]. MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (02): : 443 - 447

[10] EQUIPMENT FOR ION-BEAM ASSISTED DEPOSITION [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) : 570 - 573