CD2SNO4 THIN-FILMS OBTAINED BY DC REACTIVE SPUTTERING OF CD-SN ALLOYS

被引：26

作者：

LEJA, E

BUDZYNSKA, K

PISARKIEWICZ, T

STAPINSKI, T

机构：

来源：

THIN SOLID FILMS | 1983年 / 100卷 / 03期

关键词：

D O I：

10.1016/0040-6090(83)90277-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：203 / 208

页数：6

共 17 条

[1] SPUTTER DEPOSITION AND CHARACTERIZATION OF CD2SNO4 FILMS [J].

HAACKE, G ;

MEALMAKER, WE ;

SIEGEL, LA .

THIN SOLID FILMS, 1978, 55 (01) :67-81

[2] TRANSPARENT CONDUCTING COATINGS [J].

HAACKE, G .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 :73-93

[3]

HAACKE G, 1982, P SOC PHOTO-OPT INST, V324, P10, DOI 10.1117/12.933248

[4] NEW FIGURE OF MERIT FOR TRANSPARENT CONDUCTORS [J].

HAACKE, G .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4086-4089

[5]

HAACKE G, 1976, APPL PHYS LETT, V28, P622, DOI 10.1063/1.88589

[6] Spray Deposition of Cadmium Stannate Films [J].

Haacke, G. ;

Ando, H. ;

Mealmaker, W. E. .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (12) :1923-1926

[7] DEPOSITION OF TRANSPARENT HEAT-REFLECTING COATINGS OF METAL-OXIDES USING REACTIVE PLANAR MAGNETRON SPUTTERING OF A METAL AND-OR ALLOY [J].

HOWSON, RP ;

RIDGE, MI .

THIN SOLID FILMS, 1981, 77 (1-3) :119-125

[8] PHASE-COMPOSITION OF SNOX THIN-FILMS OBTAINED BY REACTIVE DC SPUTTERING [J].

LEJA, E ;

KORECKI, J ;

KROP, K ;

TOLL, K .

THIN SOLID FILMS, 1979, 59 (02) :147-155

[9]

LEJA E, 1980, THIN SOLID FILMS, V76, P283

[10] PROPERTIES OF CADMIUM STANNATE FILMS PREPARED BY RF SPUTTERING FROM POWDER TARGETS [J].

LLOYD, P .

THIN SOLID FILMS, 1977, 41 (01) :113-120

← 1 2 →