DEPOSITION OF TRANSPARENT HEAT-REFLECTING COATINGS OF METAL-OXIDES USING REACTIVE PLANAR MAGNETRON SPUTTERING OF A METAL AND-OR ALLOY

被引：41

作者：

HOWSON, RP

RIDGE, MI

机构：

来源：

THIN SOLID FILMS | 1981年 / 77卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(81)90366-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：119 / 125

页数：7

共 9 条

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[6] REACTIVE DC SPUTTERING WITH THE MAGNETRON-PLASMATRON FOR TANTALUM PENTOXIDE AND TITANIUM-DIOXIDE FILMS [J].

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