XPS AND FT-IR STUDIES OF A TITANIUM NITRIDE COMPOUND THIN-LAYER PREPARED BY ION-IMPLANTATION

被引:17
作者
PRATAP, R
BESHAI, MHN
机构
[1] Univ of Bombay, Bombay, India, Univ of Bombay, Bombay, India
关键词
D O I
10.1007/BF01729433
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
9
引用
收藏
页码:71 / 74
页数:4
相关论文
共 9 条
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