INFRARED OPTICAL-PROPERTIES OF ALUMINUM OXYNITRIDE FILMS - THEORETICAL INTERPRETATION BY THE AL-CENTERED TETRAHEDRAL MODEL

被引：14

作者：

ANSART, F

BERNARD, J

机构：

[1] Départment D'etudes Et de Recherches En Technologie Spatiale, O.N.E.R.A, C.E.R.T, Toulouse

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1992年 / 134卷 / 02期

关键词：

D O I：

10.1002/pssa.2211340216

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The optical and dielectric properties of aluminium oxynitride films are described. The tetrahedral model of the random bonds is used to determine the optical properties of five basic Al-centered tetrahedra. The statistical weights of the tetrahedra are varied and the Wiener effective medium theory is used to average the properties over the different tetrahedra. Experimentally, films of AlN are prepared by low pressure chemical vapor deposition and then are oxidized at different levels. The composition of the oxynitrides is determined by XPS. Infrared transmittance measurements are conducted in the 1100 to 400 cm-1 range. A comparison between theoretical and experimental data is given and shows a good agreement.

引用

页码：467 / 473

页数：7

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