CHARACTERIZATION OF RF-SPUTTERED ZNO THIN-FILMS BY X-RAY-DIFFRACTION AND SCANNING ELECTRON-MICROSCOPY

被引：19

作者：

SEN, S ^{[1
]}

LEARY, DJ ^{[1
]}

BAUER, CL ^{[1
]}

机构：

[1] CARNEGIE MELLON UNIV,CTR JOINING MAT,PITTSBURGH,PA 15213

来源：

关键词：

D O I：

10.1016/0040-6090(82)90024-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：7 / 14

页数：8

共 22 条

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