CLUSTER ION SOURCES

被引：323

作者：

HAGENA, OF

机构：

[1] Institut für Mikrostrukturtechnik, Kernforschungszentrum Karlsruhe, D-7500 Karlsruhe 1

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.1142933

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Clusters from gases as well as from metal vapors can be obtained from an expanding nozzle flow with the appropriate set of flow field conditions, characterized by a condensation scaling parameter GAMMA*. Cluster ion beams are characterized by a low specific charge. Accelerated cluster ion beams allow formation of energetic particle beams in the interesting range of 0.01-10 keV/atom, and the specific characteristics of cluster ion beams have led to new applications in science and technology. In this paper a status report on clusters and cluster ions from nozzle sources is given. As example the construction and results of a source for high-intensity silver cluster beams to be used for thin film formation are described.

引用

页码：2374 / 2379

页数：6

共 59 条

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