CO-POLYMER ELECTRON RESISTS - POLY(STYRENE METHYL-METHACRYLATE) CO-POLYMERS

被引：9

作者：

SHARMA, VK

AFFROSSMAN, S

PETHRICK, RA

机构：

来源：

POLYMER | 1983年 / 24卷 / 04期

关键词：

D O I：

10.1016/0032-3861(83)90022-8

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：387 / 390

页数：4

共 19 条

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[8]

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[9] EXPERIMENTAL-OBSERVATIONS OF NEARLY MONODISPERSE POLYSTYRENE AS NEGATIVE ELECTRON RESISTS [J].

LAI, JH ;

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) :696-698

[10] FABRICATION OF DEEP SQUARE-WAVE STRUCTURES WITH MICRON DIMENSIONS BY REACTIVE SPUTTER ETCHING [J].

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