POTENTIAL OF ALTERNATE DIELECTRICS FOR SINGLE AND COMPOSITE FILM FET GATE APPLICATIONS

被引：10

作者：

BALK, P ^{[1
]}

机构：

[1] TECH UNIV AACHEN,INST SEMICONDUCTOR ELECTR,SONDER FORSCH BEREICH FESTKORPER ELEKTR 56,AACHEN,FED REP GER

来源：

关键词：

D O I：

10.1007/BF02661167

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：635 / 662

页数：28

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STOFKO, EJ ;

ZANZUCCHI, PJ ;

PANKOVE, JI ;

ETTENBERG, M ;

GILBERT, SL .

[44]

YOUNG L, 1961, ANODIC OXIDE FILMS, P12

[45] THIN FILM DIELECTRIC MATERIALS FOR MICROELECTRONICS [J].

ZAININGE.KH ;

WANG, CC .