PROBING REACTIVE DEPOSITION AND SURFACE DYNAMICS USING IN-SITU REAL-TIME EMISSION MICROSCOPY

被引:7
作者
KORDESCH, ME [1 ]
机构
[1] OHIO UNIV,CONDENSED MATTER & SURFACE SCI PROGRAM,ATHENS,OH 45701
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.579718
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1517 / 1521
页数:5
相关论文
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