TRANSFORMATION OF MICROCRYSTALLINE STATE OF HYDROGENATED SILICON TO AMORPHOUS ONE DUE TO PRESENCE OF MORE ELECTRONEGATIVE IMPURITIES

被引：15

作者：

HIRAKI, A

FUKUSHIMA, Y

SATO, T

KIYONO, H

TERAUCHI, H

IMURA, T

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1983年 / 59-6卷 / DEC期

关键词：

D O I：

10.1016/0022-3093(83)90289-2

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：791 / 794

页数：4

相关论文

共 2 条

[1] SI-H VIBRATIONAL PROPERTIES IN CRYSTALLIZED HYDROGENATED SILICON FABRICATED BY REACTIVE SPUTTERING IN H-2 ATMOSPHERE
HIRAKI, A
IMURA, T
MOGI, K
TASHIRO, M
[J]. JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 277 - 280
[2] HYDROGENATED CRYSTALLINE SILICON FABRICATED AT LOW-SUBSTRATE TEMPERATURES BY REACTIVE SPUTTERING IN HE-H2 ATMOSPHERE
IMURA, T
MOGI, K
HIRAKI, A
NAKASHIMA, S
MITSUISHI, A
[J]. SOLID STATE COMMUNICATIONS, 1981, 40 (02) : 161 - 164