YBACUO THIN-FILM GROWTH ON ELECTROOPTIC LINBO3 SUBSTRATE WITH BUFFER LAYER

被引:18
作者
HASHIGUCHI, S [1 ]
MIN, EG [1 ]
KEN, S [1 ]
KOBAYASHI, T [1 ]
机构
[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 03期
关键词
OXIDE SUPERCONDUCTOR; YBACUO; THIN FILM; EPITAXY; LINBO3; BUFFER LAYER;
D O I
10.1143/JJAP.31.780
中图分类号
O59 [应用物理学];
学科分类号
摘要
Oxide superconducting YBaCuO thin films were grown on Y- and Z-cut LiNbO3 (LN) electrooptic crystal substrates with and without buffer layers, and their film crystallinity was closely investigated by X-ray diffraction, transmission electron microscopy, reflection high-energy electron diffraction and Auger electron spectroscopy. Due to the intensive reaction, direct deposition of films resulted in poor quality. When sputtered (111)-MgO film was introduced as a buffer layer, significant diffusion of constituent atoms was unavoidable among YBaCuO, MgO and LN. As a result, the superconductivity of the YBaCuO layer was substantially degraded. The Y2O3- stabilized ZrO2 (YSZ) grown by sputtering, followed by wet O2 anneal, served as a good buffer layer for Y1Ba2Cu3Oy films on LN substrates, and epitaxial growth of (001)-Y1Ba2Cu3Oy with T(c0) = 89 K was reproducibly obtained on Y-cut LN substrates.
引用
收藏
页码:780 / 785
页数:6
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