PROPERTIES OF INHOMOGENEOUS AMORPHOUS AND POLYCRYSTALLINE SEMICONDUCTOR-FILMS

被引：11

作者：

CLARK, AH

机构：

来源：

THIN SOLID FILMS | 1983年 / 108卷 / 03期

关键词：

D O I：

10.1016/0040-6090(83)90076-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：285 / 292

页数：8

共 12 条

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[9] PROPERTIES OF AMORPHOUS HYDROGENATED SILICON, WITH SPECIAL EMPHASIS ON PREPARATION BY SPUTTERING [J].

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ANDERSON, DA .

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