SYNCHROTRON RADIATION STEPPER WITH NEW ALIGNMENT SYSTEM

被引：17

作者：

SATO, F

ITO, K

MIYATAKE, T

YAMAZAKI, K

HAMADA, S

TOMITA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.585920

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A vertical stepper for synchrotron radiation (SR) x-ray lithography has been developed. Evaluation tests have been done with SR light from the superconducting compact synchrotron ''AURORA'' located in SHI-Tanashi Works, Tokyo. An overlay accuracy of less than 0.08 mum was obtained. A 0.2 mum line-and-space pattern was successfully resolved with a high-aspect ratio. The designed specifications have been attained. The system is ready for the future generation ultra-large-scale integration applications.

引用

页码：3235 / 3238

页数：4

共 6 条

[1] A VERTICAL STEPPER FOR SYNCHROTRON X-RAY-LITHOGRAPHY [J].

ISHIHARA, S ;

KANAI, M ;

UNE, A ;

SUZUKI, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06) :1652-1656

[2] HIGH-PERFORMANCE SYNCHROTRON ORBITAL RADIATION X-RAY STEPPER [J].

KOGA, K ;

NOMURA, N ;

YASUI, J ;

TERUI, Y ;

NAGANO, H ;

FUJITA, K ;

KUSUMOTO, S ;

NAKANO, K ;

NAKATANI, S ;

MIZUGUCHI, S ;

AOKI, S ;

YAMAMOTO, M ;

YAMAGUCHI, K ;

SATO, T ;

MATSUO, K ;

YANAGIDA, K .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :1633-1637

[3]

NAKABUSHI H, 1992, P EPAC, V206

[4] APPLICATION OF SYNCHROTRON RADIATION TO X-RAY LITHOGRAPHY [J].

SPILLER, E ;

EASTMAN, DE ;

FEDER, R ;

GROBMAN, WD ;

GUDAT, W ;

TOPALIAN, J .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) :5450-5459

[5]

Takahashi N., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V923, P47, DOI 10.1117/12.945631

[6]

TOMITA Y, 1992, INT J JPN S PREC ENG, V26, P47

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