共 7 条
[1]
Clegg J. B., 1980, Surface and Interface Analysis, V2, P91, DOI 10.1002/sia.740020304
[2]
Daiser S., UNPUB
[3]
DAISER SM, 1987, MIKROCHIM ACTA, V1, P371
[4]
MAUL W, 1987, PHYS REV B, V54, P9
[5]
VONCRIEGERN R, 1984, SPRINGER SER CHEM PH, V36, P308
[6]
RASTER SCANNING DEPTH PROFILING OF LAYER STRUCTURES
[J].
APPLIED PHYSICS,
1977, 12 (02)
:149-156
[7]
INFLUENCE OF THE IMPACT ANGLE ON THE DEPTH RESOLUTION AND THE SENSITIVITY IN SIMS DEPTH PROFILING USING A CESIUM ION-BEAM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1985, 3 (03)
:1350-1354