TEMPERATURE AND COMPOSITION DEPENDENCE OF THE HIGH-FLUX PLASMA SPUTTERING YIELD OF CU-LI BINARY-ALLOYS

被引：6

作者：

KRAUSS, AR

MENDELSOHN, MH

GRUEN, DM

CONN, RW

GOEBEL, DM

HIROOKA, Y

LEUNG, WK

BOHDANSKY, J

机构：

[1] UNIV CALIF LOS ANGELES,DEPT NUCL ENGN,LOS ANGELES,CA 90024

[2] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 23卷 / 04期

关键词：

D O I：

10.1016/0168-583X(87)90478-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：511 / 517

页数：7

共 24 条

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