DEACTIVATION OF THE BORON ACCEPTOR IN SILICON BY HYDROGEN

被引：286

作者：

SAH, CT ^{[1
]}

SUN, JY ^{[1
]}

TZOU, JJ ^{[1
]}

机构：

[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 02期

关键词：

D O I：

10.1063/1.94287

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：204 / 206

页数：3

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