DIFFUSIVITY OF OXYGEN IN SILICON DURING STEAM OXIDATION

被引：150

作者：

MIKKELSEN, JC

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 40卷 / 04期

关键词：

D O I：

10.1063/1.93089

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：336 / 337

页数：2

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