INSITU OBSERVATION ON ELECTRON-BEAM INDUCED CHEMICAL VAPOR-DEPOSITION BY AUGER-ELECTRON SPECTROSCOPY

被引：12

作者：

MATSUI, S

MORI, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 09期

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D O I：

10.1063/1.98343

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：646 / 648

页数：3

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