IMPROVED DEPTH RESOLUTION BY SAMPLE ROTATION DURING AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING

被引：226

作者：

ZALAR, A

机构：

来源：

THIN SOLID FILMS | 1985年 / 124卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90269-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：223 / 230

页数：8

共 11 条

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