STRESS IN Y2O3 THIN-FILMS DEPOSITED BY RADIO-FREQUENCY MAGNETRON AND ION-BEAM SPUTTERING

被引：18

作者：

TUSTISON, RW

VARITIMOS, TE

MONTANARI, DG

WAHL, JM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575924

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2256 / 2260

页数：5

共 29 条

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