THERMAL-STABILITY OF SULFUR PASSIVATED INP(100)-(1X1)

被引:30
作者
ANDERSON, GW [1 ]
HANF, MC [1 ]
NORTON, PR [1 ]
LU, ZH [1 ]
GRAHAM, MJ [1 ]
机构
[1] NATL RES COUNCIL CANADA,INST MICROSTRUCT SCI,OTTAWA K1A 0R9,ONTARIO,CANADA
关键词
D O I
10.1063/1.112662
中图分类号
O59 [应用物理学];
学科分类号
摘要
Auger electron spectroscopy, low-energy electron diffraction, thermal desorption spectroscopy, and scanning electron microscopy have been utilized to investigate the thermal stability of S-passivated InP(100). S-passivated InP(100) is shown to be thermally stable up to approximately 730 K, where S removal and sample evaporation begins. This evaporation results in the formation of a roughened, but clean, InP(100) surface, showing the characteristic (4x2) reconstruction.
引用
收藏
页码:171 / 173
页数:3
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