SURFACE-MORPHOLOGY OF EPITAXIAL CAF2 FILMS ON SI SUBSTRATES

被引:77
作者
FATHAUER, RW [1 ]
SCHOWALTER, LJ [1 ]
机构
[1] GE,CTR RES & DEV,SCHENECTADY,NY 12301
关键词
D O I
10.1063/1.95299
中图分类号
O59 [应用物理学];
学科分类号
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页码:519 / 521
页数:3
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