STACKING FAULTS IN STEAM-OXIDIZED SILICON

被引：34

作者：

JOSHI, ML

机构：

来源：

ACTA METALLURGICA | 1966年 / 14卷 / 10期

关键词：

D O I：

10.1016/0001-6160(66)90233-1

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：1157 / &

共 33 条

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