CORNER UNDERCUTTING IN ANISOTROPICALLY ETCHED ISOLATION CONTOURS

[1] ABUZEID MM, 1979, 4TH S SOL STAT DEV T, P89

[2] ABUZEID MM, 1980, 2ND P CZECH C MICR B, P56

[3] ABUZEID MM, UNPUB

[4] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[5] DIELECTRIC ISOLATION - COMPREHENSIVE, CURRENT AND FUTURE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (01) : C5 - C12

[6] BEAN KE, 1974, ELECTROCHEMICAL SOC, V741, P58

[7] OPTIMIZATION OF HYDRAZINE-WATER SOLUTION FOR ANISOTROPIC ETCHING OF SILICON IN INTEGRATED-CIRCUIT TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (04) : 545 - 552

[8] ETCHING VERY NARROW GROOVES IN SILICON [J]. APPLIED PHYSICS LETTERS, 1975, 26 (04) : 195 - 198

[9] ANISOTROPIC ETCHING OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) : 4569 - &

[10] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[1] ABUZEID MM, 1979, 4TH S SOL STAT DEV T, P89

[2] ABUZEID MM, 1980, 2ND P CZECH C MICR B, P56

[3] ABUZEID MM, UNPUB

[4] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[5] DIELECTRIC ISOLATION - COMPREHENSIVE, CURRENT AND FUTURE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (01) : C5 - C12

[6] BEAN KE, 1974, ELECTROCHEMICAL SOC, V741, P58

[7] OPTIMIZATION OF HYDRAZINE-WATER SOLUTION FOR ANISOTROPIC ETCHING OF SILICON IN INTEGRATED-CIRCUIT TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (04) : 545 - 552

[8] ETCHING VERY NARROW GROOVES IN SILICON [J]. APPLIED PHYSICS LETTERS, 1975, 26 (04) : 195 - 198

[9] ANISOTROPIC ETCHING OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) : 4569 - &

[10] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457