MEASUREMENT OF RESISTIVITY OF SILICON EPITAXIAL LAYERS BY 3-POINT PROBE TECHNIQUE

被引：14

作者：

GARDNER, EE

SCHUMANN, PA

机构：

来源：

SOLID-STATE ELECTRONICS | 1965年 / 8卷 / 02期

关键词：

D O I：

10.1016/0038-1101(65)90047-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：165 / &

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