NITROGEN ION-IMPLANTATION - BARRIERS TO INDUSTRIAL ACCEPTANCE AND PROSPECTS FOR THE FUTURE

被引：11

作者：

ALEXANDER, RB

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 40-1卷

关键词：

D O I：

10.1016/0168-583X(89)91049-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：575 / 578

页数：4

共 19 条

[1] SHEATH THICKNESS AND POTENTIAL PROFILES OF ION-MATRIX SHEATHS FOR CYLINDRICAL AND SPHERICAL ELECTRODES [J].

CONRAD, JR .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) :777-779

[2] PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS [J].

CONRAD, JR ;

RADTKE, JL ;

DODD, RA ;

WORZALA, FJ ;

TRAN, NC .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4591-4596

[3]

CONRAD JR, 1988, B AM PHYS SOC, V33, P1718

[4] ION-IMPLANTATION AND ION ASSISTED COATING OF METALS [J].

DEARNALEY, G ;

GOODE, PD ;

MINTER, FJ ;

PEACOCK, AT ;

WADDELL, CN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2684-2689

[5] ADHESIVE, ABRASIVE AND OXIDATIVE WEAR IN ION-IMPLANTED METALS [J].

DEARNALEY, G .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :139-147

[6] APPLICATIONS OF ION-IMPLANTATION IN METALS [J].

DEARNALEY, G .

THIN SOLID FILMS, 1983, 107 (03) :315-326

[7]

Dearnaley G., 1986, Surface Engineering, V2, P213

[8] ION ASSISTED COATING PROCESSES AND APPLICATIONS [J].

DEARNALEY, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :571-574

[9]

DEARNALEY G, 1976, 4TH P C SCI IND APPL, P20

[10]

FROMSON RE, 1982, METASTABLE MATERIALS, P355

← 1 2 →